摘要 |
The invention relates to a substrate transport device (100), comprising a transport device (2) for transporting substrates (1, 32) in a direction of transport (x) of a transport plane (x-y) to a placement area (6) of a placement head (20), and at least one mechanical stopper (10, 30, 40) that has a protrusion (43) and can be displaced between a first position (P1) and a second position (P2). The invention is characterized in that the protrusion (43) stops the transport of the substrates (1, 32) in the first position (P1) and allows the transport of the substrates (1, 32) in the second position (P2), wherein the second position (P2) of the protrusion (43) relative to the transport plane (x-y) is located on the side of the placement head (20) and the first position (P1) can be adjusted to different distances from the transport plane (x-y). |
申请人 |
SIEMENS AKTIENGESELLSCHAFT;CONRAD, ROBERT;MEHDIANPOUR, MOHAMMAD;PFAFFENBERGER, WERNER;DIETRICH, STEFAN;MAYER, HANS, JUERGEN;ZIMMERMANN, BERND |
发明人 |
CONRAD, ROBERT;MEHDIANPOUR, MOHAMMAD;PFAFFENBERGER, WERNER;DIETRICH, STEFAN;MAYER, HANS, JUERGEN;ZIMMERMANN, BERND |