Solar cell structures using porous column TiO2 films deposited by CVD

摘要

A method of fabricating a photovoltaic cell for use in a solar cell structure includes preparing a first substrate; preparing a TiO₂ precursor; preparing a cold wall CVD chamber; placing the first substrate in the cold wall CVD chamber; forming a transparent conducting electrode on the first substrate; depositing a porous column TiO₂ film on the transparent conducting electrode; depositing a photosensitive material in and on the porous column TiO₂ film; forming a top electrode on the photovoltaic cell; and incorporating the photovoltaic cell into a solar cell structure. The method of the invention is suitable for forming photovoltaic cells which may be of the dye-sensitized solar cell (DSSC) type, having a liquid or solid-state electrolyte therein, or an ordered organic-inorganic heterojunction photovoltaic cell.