VAPORIZER AND FILM FORMING APPARATUS

摘要

The size of drops of liquid raw material spouted into a vaporization chamber is controlled so as to suppress any dispersion of drop size, thereby attaining assured vaporization of the drops. The vaporizer comprises raw material liquid chamber (410) into which a liquid raw material is fed at given pressure; multiple raw material spout nozzles (420) for spouting the liquid raw material stored in the raw material liquid chamber; vaporization chamber (430) for vaporizing the liquid raw material spouted from the multiple raw material spout nozzles so as to form a raw material gas; and piezoelectric device (440) for periodically changing the volume of internal space of the raw material liquid chamber so as to apply spout pressure to the liquid raw material.