| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying method capable of continuously performing a cleaning/rinsing process and a drying process, greatly reducing the amount of usage of fluid for drying, and drying both the surfaces of an object to be dried by one drying process. SOLUTION: The drying method comprises: a process for carrying in an object to be treated, where the object to be treated is carried into a drying tank, the front and rear of the object to be treated are allowed to face the inside and outside of the drying tank, respectively, a gap is provided between the object to be treated and the cleaning tank, and the object to be treated is fitted to the cleaning layer; and a drying process for supplying fluid for drying to the object to be treated and drying the object to be treated. COPYRIGHT: (C)2008,JPO&INPIT
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