| 摘要 |
PROBLEM TO BE SOLVED: To provide a position measurement sensor with high-speed position measurement and improved measurement precision, a three-dimensional position measurement instrument, and a three-dimensional position measuring method. SOLUTION: In two-dimensionally arranged pixels, photosensitive parts are electrically connected one another along a first direction and a second direction to independently acquire a first direction projection data and a second direction projection data so that the processing in a post stage is simplified. A second profile sensor 7 is inclined with respect to a first profile sensor 6 so that a tangential direction of the photosensitive parts in the first profile sensor 6 does not coincide with a tangential direction of the photosensitive parts in the second profile sensor 7. Accordingly, even when a plurality of bright spots overlap one another in the tangential direction of the photosensitive parts of one profile sensor, a plurality of bright spots of the photosensitive parts of the other profile sensor 7 do not overlap one another, and precise position information of each bright spot is acquired. COPYRIGHT: (C)2008,JPO&INPIT
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