SEALED ELASTOMER BONDED Si ELECTRODES AND THE LIKE FOR REDUCED PARTICLE CONTAMINATION IN DIELECTRIC ETCH
摘要
An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing having a backing member having a bonding surface, an inner electrode having a lower surface on one side and a bonding surface on the other side, and an outer electrode having a lower surface on one side and a bonding surface on the other side. At least one of the electrodes has a flange, which extends underneath at least a portion of the lower surface of the other electrode.
申请公布号
WO2007094984(A3)
申请公布日期
2008.04.17
申请号
WO2007US03008
申请日期
2007.02.05
申请人
LAM RESEARCH CORPORATION;REN, DAXING;MAGNI, ENRICO;LENZ, ERIC;ZHOU, REN