SCANNING PROBE MICROSCOPE, PROBE FOR THE SAME, AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of discriminating each reflected light from a plurality of cantilevers. SOLUTION: The scanning probe microscope is provided with a first light source 15 for emitting first irradiation light having a first wavelength; a second light source 25 for emitting second irradiation light having a second wavelength different from the first wavelength; a first probe 1 for scanning a sample 50a and reflecting the first irradiation light as first reflected light; a second probe 2 for scanning a sample 50b and reflecting the second irradiation light as second reflected light; a first light reception element 16 for receiving the first reflected light having the first wavelength; and a second light reception element 26 for receiving the second reflected light having the second wavelength. COPYRIGHT: (C)2008,JPO&INPIT