| 摘要 |
PROBLEM TO BE SOLVED: To construct a connection inspection apparatus for integrated circuit devices capable of checking the quality of coupling sections of integrated circuit devices with a high degree of accuracy in a short time. SOLUTION: The connection inspection apparatus for integrated circuit devices is constructed of a multipoint probe equipped with a test wave application circuit, where a plurality of probe pins contacting a plurality of contacting parts of an inspected integrated circuit device, respectively, are implanted in an insulating plate, connected to a test wave application terminal applying test wave through switching elements for each probe pin, a switching control means outputting switch signal selectively for each one element to switching elements of the test wave application circuit to form the test wave application circuit, a test wave application means applying test wave to the test wave application circuit formed by the switching control means, and a connectedness diagnostic means observing the applied test wave and the reflected wave reflected from the inspected integrated circuit device to diagnose connectedness of the inspected integrated circuit device. COPYRIGHT: (C)2008,JPO&INPIT
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