Sb-Te BASE ALLOY SINTER SPUTTERING TARGET

摘要

An antimony-tellurium base alloy sinter sputtering target comprising antimony and tellurium as major components, characterized in that it has a structure comprising antimony-tellurium base alloy particles and fine carbon or boron particles with which the alloy particles are surrounded, and that when the average diameter of the antimony-tellurium base alloy particles and the particle diameter of the carbon or boron are expressed by X and Y, respectively, then Y/X is in the range of from 1/10 to 1/10,000. The antimony-tellurium base alloy sinter sputtering target has the improved structure, is inhibited from cracking, and prevents arcing from occurring during sputtering.