| 摘要 |
<p>A tray transfer apparatus is provided with a stocker (210) for storing a customer tray (KST); a lifting apparatus (220) which holds the customer tray (KST) and vertically moves; and a tray transfer apparatus (230), which holds the customer tray (KST) and moves in a vertical direction and a horizontal direction, for transferring and receiving the customer tray (KST) between the stocker (210) and the lifting apparatus (220). The tray transfer apparatus (230) has a plurality of movable positions (M<SUB>1</SUB>, M<SUB>2</SUB>) in the vertical direction, at which the tray transfer apparatus (230) can shift along the horizontal direction.</p> |
