CERAMIC OSCILLATION FLOW METER HAVING COFIRED PIEZORESISTIVE SENSORS

摘要

An apparatus measures the amount of fluid (21) flowing in a channel (18, 20). The apparatus has a housing (14) defining an inlet (16) for receiving the fluid (21), and first and second diversion channels (18, 20) for alternately receiving the fluid (21) from the inlet (16). A first nozzle (46) for receives the fluid (21) from the first diversion channel (18) and deflects the fluid (21) from the inlet (16) into the second diversion channel (20). A second nozzle (48) receives the fluid (21) from the second diversion channel (20) and alternately deflects the fluid (21) from the inlet (16) into the first diversion channel (18). A material (56) overlies at least one of the first and second diversion channels (18, 20) and has a sensing area that distorts due to a pressure change caused by the fluid (21).