| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser peaning apparatus which can prevent the corrosion and contamination due to the liquid for enclosing plasma, and can prevent the large quantity consumption of the liquid, and does not require a large device such as a water tank, and is clean, energy saving, and excellent in the convenience. <P>SOLUTION: The laser peaning apparatus comprises a liquid holding head 1 for forming and holding the liquid R for enclosing plasma on the local surface of a workpiece W, and a laser radiating head 2 for irradiating the surface of the workpiece W with a laser beam via the liquid held by the liquid holding head 1. <P>COPYRIGHT: (C)2008,JPO&INPIT |
