INDUCTOR FORMED IN SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

An inductor formed in a semiconductor integrated circuit is provided to increase an inductance value and a quality factor by winding metal lines in several strands. A first insulator layer(20) is formed on a semiconductor substrate(10), and a first lower metal line(300) and a second lower metal line are formed on the first insulator layer. A second insulator layer(30) is formed to cover the first and second lower metal lines. An upper metal line(301) is formed on the second insulator layer, and has a first metal line(310) of one strand and a second metal line(312) of two strands. A first terminal(Port1) and a second terminal are formed on the second insulator layer, and are connected to the first and second lower metal lines, respectively, via a first via contact(302) and a second via contact.