| 摘要 |
<p>A substrate conveyance apparatus is provided to prevent damages of a surface and both side ends of a substrate and to convey the substrate accurately by absorbing a backside of the substrate to perforations by using a vacuum without a mismatch caused by slip. An adsorption pad(25,30) absorbs and keeps a surface of a tape type substrate(5) by vacuum adsorption. A slide conveyance part(6A,6B) mounts the adsorption pad, slides the adsorption pad which absorbs the substrate toward the downstream of the conveying direction, and returns the adsorption pad toward the upper stream of the conveying direction. An elevating unit mounts the slide conveyance part, ascends when the adsorption pad is conveyed to the downstream and descends when the adsorption pad is conveyed to the upper stream.</p> |
