| 摘要 |
A method for inspecting particles of a diamond polishing member using pad damage is provided to select a diamond polishing member having required polishing precision by using information on a distribution state of working particles. A diamond polishing member is mounted in an apparatus having a pad, and then pad powder is adhered on working particles after the polishing member is operated during a predetermined time(S100). An image is obtained from a front surface of the diamond polishing member using a scanner or camera(S200). A region outside a polishing region of the diamond polishing member is removed from the image using an image edit program(S300). A portion attached with the particle is represented by a spot, and then the spot is highlighted to detect data on the spot(S400). The detected data is verified to analyze distribution of working particles(S500).
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