| 摘要 |
PROBLEM TO BE SOLVED: To improve lowering of alignment precision due to a reduced short time and a surface deviation when previously temporarily adhering the part of corners of two substrates with a heating head in the case that the two substrates are joined by using an adhesive sheet to manufacture a multilayer substrate. SOLUTION: The multilayer substrate mutually temporarily adheres and laminates two substrates 11 and 12 through the adhesive sheet such as an epoxy resin. A temporary adhesion region 16 having a plurality of heating small holes 17 is formed on one substrate 11, for instance, on four corners respectively, and a plating layer 25 is formed on the inner peripheral face of the heating small holes 17 to efficiently transmit heat to the adhesion sheet 13 through the plating layer 25 from the heating head 18. COPYRIGHT: (C)2004,JPO |
