THREE DIMENSIONAL POSITION OBSERVATION METHOD AND APPARATUS

摘要

A three-dimensional position observation apparatus provided with a lens system having focusing and diaphragm mechanisms, for forming an image on an imaging plane by light from an observation object includes a beam steering member disposed in a light path extending from the observation object to the imaging plane, for changing a traveling direction of observation light into a plurality of different directions, and an image analyzing unit for analyzing a position of the observation obj ect based on a positional relation between a plurality of images on the imaging plane formed by light passing through the beam steering member.