| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an abrasion speed selection ratio improver to attain the purpose of improving the abrasion speed selection ratio of an insulating film and a stopper film stably and at a lower cost, and a method of manufacturing an abrasive liquid composition containing the abrasion speed selection ratio improver, and a method of manufacturing a substrate to be polished using the abrasive liquid composition. SOLUTION: The abrasion speed selection ratio improver comprises at least one compound selected from the group consisting of an amino acid, a compound containing a multivalent hydroxide group, and an alkylene oxide, and improves abrasion speed of an insulating film against that of a stopper film. The abrasive liquid composition contains the abrasion speed selection ratio improver, and this method of manufacturing a substrate to be polished uses the abrasive liquid composition.</p> |
