| 摘要 |
<p>PROBLEM TO BE SOLVED: To remove a substrate to be treated being sucked electrostatically on a substrate holding base separately from the holding base stably and very radidly while a breakage of this substrate and trouble in transfer of the substrate are prevented from being generated. SOLUTION: The electrostatic suction force of a substrate 4 to be treated to a substrate holding base 3 is detected on the basis of a thrashing-up load at the time when the substrate 4 is thrusted up and when the detected value of the thrusting-up load is higher than a prescribed value, a thrusting-up operation is made to stop before a thrusting-up force reaches the limit of a shearing stress in the substrate 4. Simultaneously with that, heat transfer gas is again fed between the substrate 4 and the holding base 3 to set the transfer heat gas between the substrate 4 and the holding base 3 at a prescribed pressure and while the substrate 4 is pushed up by the pressure of this heat transfer gas, the thrusting-up force and the pressure of the heat transfer gas are feedback-controlled on the basis of the detected value of the thrusting-up load and the substrate 4 is made to rapidly separate from the base 3.</p> |
