发明名称
摘要 An apparatus for attaching an object semi-automatically onto a dummy wafer comprising a stage having a loading surface on which the dummy wafer rests, a pressing device for attaching the object gradually onto the dummy wafer placed on the loading surface, and a supporting device for placing the object in a position spaced apart from the loading surface.
申请公布号 JP4064704(B2) 申请公布日期 2008.03.19
申请号 JP20020102785 申请日期 2002.04.04
申请人 发明人
分类号 H01L21/66;B24B29/02;H01L21/00;H01L51/00 主分类号 H01L21/66
代理机构 代理人
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