| 摘要 |
A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. The movable arm assembly has a general X-shaped section that has its center connected to the coaxial drive shaft assembly. The substrate holders are connected to different pairs of arm sections of the X-shaped section. The coaxial drive shaft assembly moves the arms of the X-shaped section relative to each other to move the two substrate holders in reverse unison motion between extended and retracted positions. |
