| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device capable of suppressing thermal deformation of a holding plate. <P>SOLUTION: The polishing device is constituted so that purified water used for cooling of a rotary joint is supplied from the outside to first and second rotary joints 90, 100. A purified water guide pipe line 68 for guiding a part of the purified water supplied to the second rotary joint 100 to the holding plate 40 is provided inside of a head housing 32, and a cooling passage 50, through which the purified water guided to the purified guide pipe line 68 can be passed, is formed inside the holding plate 40. <P>COPYRIGHT: (C)2008,JPO&INPIT |
