| 摘要 |
A recycling apparatus for spent protective atmosphere gas contaminated with fouling organic decomposition byproduct materials. The recycling apparatus includes a compressor having an inlet connected to a spent protective atmosphere gas supply line, and a solvent supply configured to supply solvent to a gas passage at or upstream of the compressor. The recycling apparatus also includes a first chamber connected to an outlet of the compressor, where the first chamber is configured to receive compressed gas from the compressor and to collect a mixture including the solvent and any contaminants entrapped or dissolved in the solvent.
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