摘要 |
In an n-channel type power MISFET, a source electrode in contact with an n<SUP>+</SUP>-semiconductor region (source region) and a p<SUP>+</SUP>-semiconductor region (back gate contact region) is constituted with an Al film and an underlying barrier film comprised of MoSi<SUB>2</SUB>, use of the material having higher barrier height relation to n-Si for the barrier film increasing the contact resistance to n-Si and backwardly biasing the emitter and base of a parasitic bipolar transistor making it less tending to turn-on, thereby decreasing the leak current of power MISFET. |