AN INTERFACE FOR OPERATING AND MONITORING ABATEMENT SYSTEMS
摘要
<p>Method and systems are provided for monitoring and controlling one or more abatement systems. One or more abatement systems may be represented on a display alone with one or more effluent flows from processing tools. A selected effluent flow configuration is received. An interface manifold is controlled to implement the selected effluent flow configuration. Numerous other aspects are provided.</p>
申请公布号
WO2008024446(A2)
申请公布日期
2008.02.28
申请号
WO2007US18669
申请日期
2007.08.23
申请人
APPLIED MATERIALS, INC.;LOLDJ, YOUSSEF, A.;CRAWFORD, SHAUN, W.