| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical illumination apparatus capable of individually illuminating two regions in predetermined illumination conditions, using two inner-reflection optical integrators juxtaposed. <P>SOLUTION: A first illumination system for illuminating a first illumination region (IR1) has a first diffraction optical element (3A) forming a desired optical strength distribution on an illumination eye, an inner-reflection first optical integrator (5A) for equalizing a light illuminating the first illumination region, and a first relay optical system (7) for allowing the first diffraction optical element and the first optical integrator to be optically conjugate. A second illumination system for illuminating a second illumination region (IR2) has a first diffraction optical element (3B) forming a desired optical strength distribution on its illumination eye, an inner-reflection second optical integrator (5B) for equalizing a light illuminating the second illumination region, and a second relay optical system (7) for allowing the second diffraction optical element and the second optical integrator to be optically conjugate. <P>COPYRIGHT: (C)2008,JPO&INPIT |
