发明名称 |
INORGANIC RESIST PATTERN, METHOD FOR FORMING SAME, OPTICAL MASTER DISK, METHOD FOR MANUFACTURING SAME, METHOD FOR MANUFACTURING OPTICAL DISK STAMPER AND METHOD FOR MANUFACTURING OPTICAL DISK SUBSTRATE |
摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the formation of a crystalline interfacial layer between an inorganic resist layer and a substrate or a layer under the resist layer. <P>SOLUTION: A method for forming an inorganic resist pattern includes: a step of forming an inorganic resist layer 3 comprising a metal oxide above a substrate 1; a step of irradiating the inorganic resist layer 3 with laser light 3b to form a latent image 3a of a predetermined shape; and a step of developing the inorganic resist layer 3 to form a raised and recessed pattern of the inorganic resist layer 3 in which the latent image 3a forming portion is recessed above the substrate 1, wherein formation of a crystalline interfacial layer between the inorganic resist layer 3 and the substrate 1 or a layer 2 under the resist layer 3 is suppressed by using a metal oxide comprising a single transition metal as the above metal oxide. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008046513(A) |
申请公布日期 |
2008.02.28 |
申请号 |
JP20060223672 |
申请日期 |
2006.08.18 |
申请人 |
SONY CORP |
发明人 |
SAITO NORIYUKI;ADACHI NORIO |
分类号 |
G03F7/004;G11B7/26 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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