| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a field emission type electron gun, and its operation method, capable of obtaining stable field emission current continuously for a long period of time and restraining spread of an energy distribution of field emission electron. <P>SOLUTION: The field emission type electron gun includes an electron source constituted of fibrous carbon substance and a conductive base material supporting it, an extraction device for emitting electron in an electric field, an acceleration device for accelerating electron, and a means of heating the electron source. A minimum heating temperature is to be appropriately adjusted for a fluctuation width of the field emission current to be within a regulated value, after the electron source is kept heated before the field emission. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
