发明名称 INCLINATION ADJUSTMENT MECHANISM AND GRINDING DEVICE USING IT
摘要 PROBLEM TO BE SOLVED: To adjust a tendency of central convex or central concave of a workpiece by interposing an inclination adjustment mechanism in arranging a worktable on a base of a grinding device. SOLUTION: The inclination adjusting mechanism 25 to push and fix a collar part 19 of an outer periphery of a holding part 16 to hold the worktable 15 free to rotate and the base 13 by an elastic member 41 through pedestals 23, 30, 31 is equally arranged, the pedestals 30, 31 are divided into two by inclined surfaces 38, 40 in the drawing direction, and height in the drawing direction is made variable by displacing the lower pedestal 30 in parallel in the shaft center direction by a feed screw shaft member 32 provided on the lower pedestal 30. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008044079(A) 申请公布日期 2008.02.28
申请号 JP20060223048 申请日期 2006.08.18
申请人 NACHI FUJIKOSHI CORP 发明人 TAKAHASHI MASAHISA
分类号 B24B7/16;B23Q1/64;H01L21/304 主分类号 B24B7/16
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