SHOWERHEAD FOR GAS SUPPLY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a showerhead for a gas supply apparatus. SOLUTION: The showerhead for the gas supply apparatus includes a body having a distribution plate on one side and at least one gas chamber contained within the body. A plurality of holes extend normally from an outer surface of the distribution plate to the chamber. Furthermore, at least a portion of at least one hole is frustoconical or frustopyramidal in shape along the normal axis and the base of the frustoconical or frustopyramidal hole is positioned adjacent the outer surface of the distribution plate. COPYRIGHT: (C)2008,JPO&INPIT