| 摘要 |
A position detecting device includes a plurality of detecting units that detects marks on an object, a plurality of housing units that houses the detecting units, and a holding member that fixedly holds the housing units. A total expansion amount of the housing units due to temperature change is substantially equal to an expansion amount of the holding member between the fixed positions due to temperature change. The total expansion amount represents a total amount of expansion of the housing units from a fixed-position plane including a fixed position to a detection-position plane including a detection position in a direction parallel to a moving direction of the object. The fixed-position plane and the detection-position plane are perpendicular to the moving direction of the object.
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