| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer equipment and method capable of selectively unloading a plurality of substrates loaded in a container. SOLUTION: The substrate transfer equipment, which pulls out and transfers a plurality of the substrates from the container, comprises a plurality of blades in which a plurality of the substrates are laid during transferring, respectively; a pulling-out member 500a which is installed in one end of each blade 420a and is projected upward from the blade 420a when the substrate is pulled out from the container; and a drive unit 600 which makes each pulling-out member 500a selectively project from each blade 420a. The pulling-out member 500a is a hollow shape and is installed so as to move up and down in a fastening aperture 424a formed in one end of the blade 420a. The pulling-out member 500a has a shape in which an upper part was blocked. COPYRIGHT: (C)2008,JPO&INPIT
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