| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma etching electrode which consists of a tabular member and a support member for supporting the tabular member, wherein the tabular member and the support member are firmly fixed to each other and the tabular member which is a consumable part can be exchanged easily. SOLUTION: The plasma etching electrode consists of the tabular member 1 and the annular support member 2 for supporting the tabular member 1. On the outer circumferential surface of the tabular member, male screws are formed; and on the inner circumferential surface of an end part of a stepped structure of the ring-shaped support member, female screws are formed. By making the male screws of the tabular member and the female screws of the annular member engage with each other, the tabular member and the annular member are joined together to form the plasma etching electrode. COPYRIGHT: (C)2008,JPO&INPIT
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