| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining system and a laser beam machining method capable of efficiently specifying the focal position of machining laser beams by a visible laser with high accuracy. <P>SOLUTION: A laser beam machining system 100 comprises a machining laser beam oscillator 1, a condensing optical system 3 having a condensing lens 32, two visible laser beam oscillators 51, 52, a movement adjustment unit for performing the advancing/retracting adjustment by synchronizing the condensing lens 32 with the visible laser beam oscillators 51, 52, an image pickup unit for picking up an image of the spot light of the visible laser beams on a workpiece W, an image processing unit for processing the picked-up image and displaying the image after the processing, a calculation unit for calculating the distance between centers of gravity by calculating the position of the center of gravity of the spot light of each visible laser beam formed on the workpiece W according to the movement of the condensing lens 32 in a state in which the respective visible laser beams are focused on the focal position of the machining laser beams, and a control unit for controlling the movement adjustment unit so that the distance between the centers of gravity becomes zero. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
