| 摘要 |
PROBLEM TO BE SOLVED: To reduce unnecessary transfer and unnecessary stock, and contribute to enhancement of productivity by performing a check operation on a process processing device while online manufacturing semiconductor device. SOLUTION: A frequency of an operation check performed on each process processing device 1-1 to 1-n is calculated. Based on the frequency of the operation check, a measuring device 2 for performing the operation checks is predicted. If amounts of, for example, NPW6a for film-thickness measurement and NPW6b for dust measurement stored in a stocker 7-3 near the measuring device 2 are less than a predetermined amount, for example, the NPW6a for film-thickness measurement and the NPW6b for dust measurement are transferred in advance to a stocker 2 near the measuring device 2. COPYRIGHT: (C)2008,JPO&INPIT |
