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发明名称
Mikroskopsystem mit Elektronenmikroskop und Rastersondenmikroskop
摘要
申请公布号
DE69838893(D1)
申请公布日期
2008.02.07
申请号
DE1998638893
申请日期
1998.08.19
申请人
JAPAN SCIENCE AND TECHNOLOGY AGENCY, KAWAGUCHI;JEOL LTD.
发明人
OHNISHI, HIDEAKI;KONDO, YUKIHITO;TAKAYANAGI, KUNIO
分类号
G01N27/00;G01N37/00;G01Q30/02;G01Q30/16;G01Q60/10;G21K5/10;H01J37/28
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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