| 发明名称 |
Lithographic apparatus and lithographic apparatus cleaning method |
| 摘要 |
An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.
|
| 申请公布号 |
US2007285631(A1) |
申请公布日期 |
2007.12.13 |
| 申请号 |
US20060437876 |
申请日期 |
2006.05.22 |
| 申请人 |
ASML NETHERLAND B.V |
发明人 |
STAVENGA MARCO KOERT;JANSEN HANS;WANTEN PETER FRANCISCUS;LEONARDUS CUIJPERS JOHANNES WILHELMUS JACOBUS;BEEREN RAYMOND GERARDUS MARIUS |
| 分类号 |
G03B27/52;B08B3/12;B08B6/00 |
主分类号 |
G03B27/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
