发明名称 |
Microfabricated Devices and Method for Fabricating Microfabricated Devices |
摘要 |
Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.
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申请公布号 |
US2007284699(A1) |
申请公布日期 |
2007.12.13 |
申请号 |
US20070736168 |
申请日期 |
2007.04.17 |
申请人 |
BIOSCALE, INC. |
发明人 |
MILLER MICHAEL F.;BAKSHI SHIVALIK |
分类号 |
H01L21/31;H01L23/58 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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