NOVEL NANOPARTICLE PATTERNING PROCESS

摘要

A method of making a metallic pattern (250) comprises: depositing a layer of photoresist (130) on a substrate (110); forming a patter on the photoresist; depositing a layer of metal nanoparticles (190) on the photoresist and pattern; removing the photoresist and overlying metal nanoparticles on the photoresist; and sintering the remaining nanoparticles to form a metallic pattern.