| 摘要 |
A reaction chamber, and a method for loading a substrate into the reaction chamber are provided to achieve a mass production of a nano tube and to prevent load/unload errors of a substrate caused by a thermal deformation of an arm. A reaction chamber(100) is provided to produce a carbon nano tube. A reaction tube(120) includes a front plane, a back plane and a side plane(126), and provides a space for performing a nano tube production process on a composition substrate. The reaction chamber includes a heater for heating the reaction tube. The side plane is parallel to a longitudinal direction(44) of the reaction tube. An entrance(126a) is installed at the side plane, and composition substrate is supplied through the entrance in a vertical direction(42) to the longitudinal direction.
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