MICROMECHANICAL ACCELERATION SENSOR

摘要

In a sensor having a centrifugal mass which can be displaced in the z direction and is in the form of a rocker (1), it is proposed, in order to avoid asymmetrical clipping, to provide a stop device (8), which shortens the possible displacement, on the side of the shorter lever arm (2) in the event of the rocker (1) having lever arms (2, 3) of different lengths or to provide at least one laterally arranged additional mass (11) on one lever arm (10) in the case of lever arms (9, 10) of the same length, with the result that the maximum mechanical displacement of the centrifugal mass is the same on both sides of the asymmetrical rocker (1).