| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas supply equipment flow path block on/from which a filter with a gasket is easily mounted/demounted and whose leakage is easily inspected, and to provide a semiconductor manufacturing gas supply unit. <P>SOLUTION: A body member 2 having a flow path 21 in which fluid flows and a joint member 3 having a flow path 31 which is communicated with the flow path 21 are fastened to each other with a bolt 5 to form the flow path block. The filter 4 with the gasket is held between a protruded portion 31c of the joint member 3 and a protruded portion 21d of the body member 2. Into the side of the outer diameter of the filter, a guide ring 6 is pressed whose inner diameter is larger than that and which has a slit 61. The block is communicated inside with outside air through the slit. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
