| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus which is highly efficient and labor-saving. SOLUTION: The cleaning apparatus comprises a cleaning tank 1 cleaning a workpiece contained in a basket BK; a recovering column 2 from which a cleaning liquid is supplied to the cleaning tank 1 and into which the used cleaning liquid is recovered; a distiller 3 distilling and regenerating the cleaning liquid received from the recovering column 2; a vacuum pump 4 appropriately evacuating the respective part 1-3; an elevating device 5 carrying the basket BK into and out of the cleaning tank 1; and a control part 6 controlling the operation of the whole apparatus. The elevating device 5 comprises a vertically movable base plate 20 and locking parts 21 extending downward from the movable base plate 20. The movable base plate 20 also serves as a sealing lid of the cleaning tank 1. COPYRIGHT: (C)2008,JPO&INPIT
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