| 摘要 |
An apparatus and a method for automatic multi-focus alignment are provided to align cameras precisely by using two or more systems, and deal with multiple foci by employing a precise motor. A plurality of CCD(Charge Coupled Device) cameras(231,232) photographs B/W(black and white) alignment images for covering an FOV(Front Of View) of an alignment mark. A host(300) has position information for respective CCD cameras, and regulates positions and focus heights of the cameras according to operation change and process change. A camera position controller(290) moves the CCD cameras according to the position information of respective CCD cameras, which is supplied from the host. An image acquiring unit(250) acquires the photographed alignment images. An image reading unit(260) reads the alignment images extracted from the image acquiring unit, and acquires alignment position information of the CCD cameras. A motor controller(270) generates a motor control signal according to the read alignment position information. A precise motor aligns the CCD cameras precisely by moving the CCD cameras upwardly and downwardly according to the generated motor control signal. |
