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发明名称
Observation apparatus and observation method using an electron beam
摘要
申请公布号
EP1274114(A3)
申请公布日期
2007.11.28
申请号
EP20020014444
申请日期
2002.06.28
申请人
HITACHI, LTD.
发明人
KOGUCHI, MASANARI;NAKAMURA, KUNIYASU;UMEMURA, KAORU;TANIGUCHI, YOSHIFUMI;ICHIHASHI, MIKIO
分类号
G01N23/20;H01J37/28;G21K5/04;H01J37/22;H01J37/295
主分类号
G01N23/20
代理机构
代理人
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