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发明名称
VACUUM ARC SOURCE COMPRISING A DEVICE FOR GENERATING A MAGNETIC FIELD
摘要
申请公布号
EP1576641(B8)
申请公布日期
2007.10.17
申请号
EP20030753214
申请日期
2003.10.30
申请人
OERLIKON TRADING AG, TRUEBBACH
发明人
SCHUETZE, ANDREAS;WOHLRAB, CHRISTIAN
分类号
H01J37/32;C23C14/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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