发明名称 |
Heating element |
摘要 |
There is disclosed a heating element 10 comprising: at least
a heat-resistant base member 1;
a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;
a protection layer 4 with an insulating property formed on the conductive layer; and
a corrosion-resistant layer 4p having a nitrogen gas permeability of 1x10 -2 cm 2 /sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
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申请公布号 |
EP1845754(A1) |
申请公布日期 |
2007.10.17 |
申请号 |
EP20070007534 |
申请日期 |
2007.04.12 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
KIMURA, NOBORU;KUBOTA, YOSHIHIRO;YAMAMURA, WAICHI;KANO, SHOJI |
分类号 |
H01L21/683;H01L21/67;H05B3/14;H05B3/28 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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