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发明名称
Production method for semiconductor integrated circuit device and semiconductor integrated circuit device
摘要
申请公布号
KR100768363(B1)
申请公布日期
2007.10.17
申请号
KR20017016181
申请日期
2001.12.17
申请人
发明人
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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