HALF TONE MASK HAVING MULTI-STEP STRUCTURE AND METHOD FOR MANUFACTURING THEREOF

摘要

A half tone mask having a multi-stage structure and a manufacturing method thereof are provided to shorten a tact time and improve productivity by simplifying a process. A half tone mask having a multi level structure includes a transparent substrate(110), a light blocking part(130), a light transmitting part(120), and a half transmitting part(140). The transparent substrate(110) is generally made of quartz for transmitting light of a predetermined wavelength. The light blocking part(130), the light transmitting part(120), and the half transmitting part(130) are formed by patterning a light blocking film formed on the transparent substrate(110) in a multi level structure. The light transmitting part(120) is formed on the transparent substrate(110) to transmit light of a predetermined wavelength. The light blocking part(130) is formed on the transparent substrate(110) to block light of a predetermined wavelength. The half transmitting part(140) is formed on the transparent substrate(110) to partially transmit light of a predetermined wavelength.