| 摘要 |
PROBLEM TO BE SOLVED: To improve characteristics of a surface acoustic wave device and reduce deterioration of an electrode of the device. SOLUTION: The surface acoustic wave device includes: a substrate 10; a piezoelectric film 13 formed on a diamond layer 10b of a main surface of the substrate; an interdigital electrode 15a formed on the piezoelectric film for generating a surface acoustic wave; and an electrode coating 17 formed on the electrode so as to cover the electrode and made of the same material as that of the piezoelectric film 13. By covering the interdigital electrode 15a entirely with the piezoelectric film 13 and the electrode coating 17 made of the same material as that of the piezoelectric film, the stress migration tolerance of the electrode is improved. COPYRIGHT: (C)2007,JPO&INPIT
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